7/2/2013

7/2/2013

Things to do:
1. Check results of yesterdays NPGS run on SEM
2. Set up new NPGS pattern with thicker lines and run NPGS on EL6 coated wafer.
3. Spin on CNTs
4. Check results of the EL6 NPGS run
5. Use furnace to grow SIO2 layer on 2 new wafers

Things that were done:

1. We could not locate the pattern on the PMMA coated wafer
       - we believe our move step did not position the beam over our sample
2. Successfully used original pattern w/ spot size 3 @ 1.5 kV (blanker at position 3) to create a 4x4 array on the EL6 sample
3. Spun CNTs onto EL6 sample
        - observed a few aligned CNTs on EL6 sample and took pictures (will try and post)
4. Again used original pattern but w/ spot size 1 @ 1.5 kV (blanker at position 3) to create a 4x4 array on the same EL6 sample.
5. Spun on CNTs
6. Cut and cleaned new wafers to be put into the furnace tomorrow morning (7/3/13)

*Note: add scale bar to all photos

01.2_AllignCNT_EL6_07_02

 01.3_AllignCNT_EL6_07_02

 01.1_AllignCNT_EL6_07_02

 01_NPGS_EL6_07_02

 EL6- initialfocus_07_02

7/1/2013

7/1/2013

Things to do:
1. Coat two wafers (the ones we grew SiO2 on during wednesday), one with PMMA and one with EL6
2. Use NPGS and Gabe's original pattern (4x4 array) to pattern on either the PMMA or EL6 coated wafers
3. Spin on CNTs
4. Check results on SEM


Things that were done:

1. Coat two wafers (the ones we grew SiO2 on during wednesday), one with PMMA and one with EL6
2. Use NPGS and Gabe's original pattern (4x4 array) to pattern on the PMMA coated wafer
3. Spin on CNTs

6/28/2013

6/28/2013

Things to do:
1. Get certified to use SEM
2. Get added to google calendar for SEM
3. Book SEM for use on monday



Things that were done:
1. I was officially certified to use the SEM by Seita
2. Added to google calendar
3. Booked SEM from 2:00-4:30pm on Monday

6/27/2013

6/27/2013

Things to do:
1. Get certified to use SEM if it is working
2. Image using SEM
3. Use NPGS and Gabe's original pattern (4x5 array) to pattern on either the PMMA or EL6 coated wafers
4. Spin on CNTs


Things that were done:

6/26/2013

6/26/2013

Things to do:
1. Grow SiO2 on two new wafers using the furnace
2. Strip SiO2 off of two wafers, coat one in PMMA and the other in EL6
3. Get certified to use SEM
4. Image using SEM
5. Use NPGS and Gabe's original pattern (4x5 array) to pattern on either the PMMA or EL6 coated wafers
6. Spin on CNTs
7. Go through tutorial on L-edit

Things that were done:
1. Strip SiO2 off of two wafers, coat one in PMMA and the other in EL6
2. Go through tutorial on L-edit
3. Grow SiO2 on two new wafers using the furnace

Note: SEM still down